3D Optical Profilometer ControllerVR-6000

Model

VR-6000

Type

Controller

Head

VR-6200, VR-6100

Field of view

Low magnification (wide field of view)

Magnification on a 15" monitor 12×

Horizontal

24.0毫米0.94"

垂直

18.0 mm0.71"

Magnification on a 15" monitor 25×

Horizontal

12.0 mm0.47“

垂直

9.0 mm0.35“

15英寸监视器38×的放大倍率

Horizontal

8.0 mm0.31"

垂直

6.0 mm0.24“

Magnification on a 15" monitor 50×

Horizontal

垂直

4.5 mm0.18"

High magnification (high resolution)

Magnification on a 15" monitor 40×

Horizontal

7.6 mm0.30"

垂直

5.7 mm0.22"

Magnification on a 15" monitor 80×

Horizontal

3.8 mm0.15"

垂直

2.9 mm0.11“

Magnification on a 15" monitor 120×

Horizontal

2.5 mm0.10"

垂直

1.9 mm0.07"

Magnification on a 15" monitor 160×

Horizontal

垂直

1.4 mm0.06"

飞涨

1× to 4×

Height measurement

Display resolution

0.1μm

Height measurement range

Without Z stitching

Low magnification (wide field of view): 10 mm0.39"
高放大倍数（高分辨率）：1毫米0.04"

With Z stitching

Low magnification (wide field of view): 50 mm1.97"
High magnification (high resolution): 30 mm1.18"

Repeatability (σ)

Without Z stitching

0.4 μm^*1

With Z stitching

1.0 μm^*1

Measurement accuracy

Without Z stitching

±2.5 μm^*1

With Z stitching

±4.0 μm^*1

Width measurement

Repeatability (σ)

Low magnification (wide field of view): 1 μm
High magnification (high resolution): 0.5 μm
^*1

Measurement accuracy

Low magnification (wide field of view): ±5 μm
High magnification (high resolution): ±2 μm
^*1

Stitching function

VR-6200：完全自动测量（XY自动控制 + Z自动控制，θ自动控制），自动映射创建，自动区域设置^*2
VR-6100: Manual measurement (XY manual operation + Z automatic control)^*2

Stitching function

Motorized rotational unit

VR-6200: Supported^*2
VR-6100: Not supported

XY measurable range

VR-6200: 300 × 150 mm11.81" × 5.91"^*2
VR-6100: 92 × 86 mm3.62“×3.39”^*2

Stage

XY stroke

VR-6200: 278 × 134 mm10.94" × 5.28"(motorized)
VR-6100：70×70毫米2.76" × 2.76"(manual)

Z stroke

69 mm2.72"(motorized)

Load capacity

4.5公斤9.92 lb

Working distance

75 mm2.95"

Image receiving element

4 megapixel monochrome CMOS

发射机镜头

Double-telecentric lens × 2

Receiver lens

Double-telecentric lens

Light sources

Observation light source

LED ring light (red, blue, green)

Measurement light source

白领导

数据处理

Dedicated PC specified by KEYENCE (OS: Windows 10 Pro)

Power supply

Power voltage

100 to 240 VAC ±10%, 50/60 Hz

Power consumption

200 VA max.

Environmental resistance

Ambient temperature

+15 to 30°C+59 to 86°F

相对湿度

20 to 80% RH (no condensation)

Weight

Approx. 4 kg8.82 lb