Measurement unitVK-X260K

Model

VK-X260K

Total magnification

Up to 28000×^*1

Field of view (minimum range)

11 µm to 5400 µm

Frame rate

Laser measurement speed

4 to 120 Hz, 7900 Hz^*2

Measurement principles

Optical system

Pinhole confocal optical system

Light receiving element

16-bit photomultiplier

Scanning method (during general measurement and image stitching)

Automatic upper/lower limit setting, high-speed light intensity optimization (AAGII),
poor reflected light intensity supplement (Double Scan)

Height measurement

Display resolution

0.5纳米

Linear scale

Dynamic range

16位

Repeatability σ

20× 40 nm , 50× 12 nm ,
150× 12 nm^*3

Memory for Z-axis measurement

14 million steps

Accuracy

0.2+L/100 µm or less (L=Measuring Length)^*3

Z stage configuration

Structure

Base with separate measuring head

Maximum sample height

28 mm1.102", 128 mm5.039"(option)

Width measurement

Display resolution

1 nm

Repeatability 3σ

20× 100 nm, 50× 40 nm ,
150× 20 nm^*3

Accuracy

±2%^*3

XY stage configuration

Manual: Operating range

70 mm×70 mm2.76" × 2.76"

Motorized: Operating range

50 mm × 50 mm1.97" × 1.97"100 mm × 100 mm3.94" × 3.94"^*4

Observation

Observation image

Super-high-resolution color CCD image
16-bit laser color confocal image
Confocal + ND filter optical system
C-laser differential interference image

Maximum capture resolution

3072×2304

Measurement laser light source

Wavelength

Violet laser, 408 nm

Maximum output

0.95 mW

Laser Class

Class 2 laser product (IEC60825-1)

Weight

Microscope unit

Approx. 26 kg (sensor head detached: approx. 10 kg)

Controller

Approx. 11 kg