Shape Measurement Laser MicroscopeVK-X200K

VK-X200K - Shape Measurement Laser Microscope

Specifications

Model			VK-X200K
Type			Controller
Objective lens magnification	Magnification on a 15” monitor 100x		―
	Magnification on a 15” monitor 200x
	Magnification on a 15” monitor 400x
	Magnification on a 15” monitor 1000x
	Magnification on a 15” monitor 2000x
	Magnification on a 15” monitor 3000x
Observation/ measuring range	Horizontal (H): μmMil	Magnification on a 15” monitor 100x
		Magnification on a 15” monitor 200x
		Magnification on a 15” monitor 400x
		Magnification on a 15” monitor 1000x
		Magnification on a 15” monitor 2000x
		Magnification on a 15” monitor 3000x
	Vertical (V): μmMil	Magnification on a 15” monitor 100x
		Magnification on a 15” monitor 200x
		Magnification on a 15” monitor 400x
		Magnification on a 15” monitor 1000x
		Magnification on a 15” monitor 2000x
		Magnification on a 15” monitor 3000x
Working distance: mminch	Magnification on a 15” monitor 100x
	Magnification on a 15” monitor 200x
	Magnification on a 15” monitor 400x
	Magnification on a 15” monitor 1000x
	Magnification on a 15” monitor 2000x
	Magnification on a 15” monitor 3000x
Numerical Aperture (N.A.)	Magnification on a 15” monitor 100x
	Magnification on a 15” monitor 200x
	Magnification on a 15” monitor 400x
	Magnification on a 15” monitor 1000x
	Magnification on a 15” monitor 2000x
	Magnification on a 15” monitor 3000x
Optical zoom			1x to 8x
Total magnification			200x to 24000x
Optical system for observation/measurement			Pinhole confocal optical system
Height measurement	Measuring range		7 mm0.28"
	Display resolution		0.0005 µm
	Repeatability σ		0.012 µm^*1
Width measurement	Display resolution		0.001 µm
	Repeatability 3σ		0.02 µm^*2
Frame memory	Pixel count		2048 x 1536, 1024 x 768, 1024 x 64
	For monochrome image		16 bit
	For color image		8-bit for RGB each
	For height measurement		24-bit
Frame rate	Surface scan		4 Hz to 120 Hz
	Line scan		7900 Hz
Auto function			AAG (Auto gain), Auto focus, Auto upper/lower limit setting, Double Scan brightness settings
Measurement laser light source	Wavelength		Violet laser, 408 nm
	Maximum output		0.95 mW
	Laser Class		Class 2 Laser Product (IEC 60825-1, FDA (CDRH) Part1040.10^*3)
Laser light-receiving element			PMT (Photoelectron Multiplier Tube)
Light source for optical observation	Lamp		100 W halogen lamp
Color camera for optical observation	Imaging element		1/3" Color CCD image sensor
	Recording resolution		Super high resolution (3072×2304)
	Auto adjustment		Gain, Shutter speed
Data processing unit			Dedicated PC, supplied by KEYENCE with the VK-X (OS: Windows 7 Professional Edition)^*4
Rating	Power voltage		100 to 240 VAC ±10 %, 50/60 Hz
	Power consumption		450 VA max.
Weight			Approx. 11 kg
^1When a standard height difference of 2 µm is measured with the 50x objective lens. ^2When the KEYENCE reference chart line width of 1 µm is measured with the 150x objective lens in line peak mode (image averaging: 8 times). ^3The laser classification for FDA (CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice No.50. ^4Windows 7 is a registered trademark of Microsoft, U.S.A.

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