Measurement head: Red semiconductor laserVK-X1050

Model

VK-X1050

Type

Head unit

Total magnification

Up to 28,800 x^*1

Field of view (minimum range)

11 µm to 7,398 µm

Frame rate (laser measurement speed)

4 to 125 Hz, 7,900 Hz^*2

Measurement principle

Optical system

Pinhole confocal optical system, Focus variation

Light-receiving element

16-bit photomultiplier: High-definition color CMOS

Scanning method (during general measurement and image stitching)

Automatic upper/lower limit setting, high-speed light intensity optimization (AAGII) , poor reflected light intensity supplement (Double Scan)

Height measurement

Display resolution

5 nm

Linear scale

Dynamic range

16 bits

Repeatability σ

Laser confocal

20 x: 40 nm, 50 x: 20 nm

Focus variation

5 x: 500 nm, 10 x: 100 nm, 20 x: 50 nm, 50 x: 30 nm

Height data acquisition range

700,000 steps

Accuracy

0.2 + L /100 µm or less (L = Measuring length)^*3

Width measurement

Display resolution

10 nm

Repeatability 3σ

Laser confocal

20 x: 100 nm, 50 x: 50 nm

Focus variation

5 x: 400 nm, 10 x: 400 nm, 20 x: 120 nm, 50 x: 65 nm

Accuracy

Measured value ±2 % or less^*3

XY stage configuration

Manual: Operating range

70 mm x 70 mm2.76" x 2.76"

Motorized: Operating range

100 mm x 100 mm3.94" x 3.94"

Observation

Observation image

High-resolution color CMOS image 16-bit laser color confocal image Confocal + ND filter optical system C-laser differential interference image

Lighting

Ring illumination, coaxial illumination

Measurement laser light source

Wavelength

Red semiconductor laser, 661 nm

Maximum output

1 mW

Laser class

2类激光产品（IEC60825-1，FDA（CDRH）部分1040.10^*4)

Power supply

Power voltage

100 to 240 VAC, 50/60 Hz

Power consumption

150 VA

Weight

Approx. 13.0 kg