Motorized XY StageVK-S105

Model

VK-S105

Movement direction

X and Y axes

Stroke

50x50 mm1.969" x 1.969"

Table size

100x100 mm3.937" x 3.937"

Guide method

Cross roller guide

Feed method

Precise pole screw, lead: 1 mm

Axis converted inertia

X axis: 9.29 × 10^-7kg·m², Y axis: 9.62 × 10^-7kg·m²

Motor

0.35 A/phase, 5-phase stepping motor, 5-wire pentagon wiring, holding torque: 0.017 N m, rotor inertia 4.2 g·cm²

Resolution

1 µm

Positioning accuracy

10 µm

Repeated positioning accuracy

±1 µm

Rebound

1 µm

Lost motion

3 µm

Intuition (vertical/horizontal)

5 µm

Parallelism A

X: 10 µm, Y: 10 µm

XY squareness

10 µm

Load capacity

3 kg

Main material/outline

Aluminum alloy, black alumite finish

Weight

2.5 kg