Large free-angle observation system (XYZ motorized)VHX-S660E

Model

VHX-S660E

XYθ stage

XY stage: Motorized/Manual

Motorized

XY-stage movement range

±50 mm±1.97"

XYθ stage size

Top surface: 233 × 185 mm9.17" × 7.28"(Center disc: ø168ø6.61")

Transmitted lighting

Provided

Z stage

Z stage: Motorized/Manual

Motorized

Z-motorized stage motor

5-phase stepping motor

t Z-motorized阶段ravel speed

17 mm0.67"/sec (max)

Z-stage movement range

49 mm1.93"

Load capacity

5 kg

XYθ stage

XY-motorized stage motor

2-phase stepping motor

XY-motorized stage resolution

1 µm (typ.)

XY-motorized stage movement speed

20 mm0.79"/sec (max.)

Z stage

Z-motorized stage resolution

0.1 µm (typ.)

Power supply

Power voltage

100 to 240 VAC, 50/60 Hz

Power consumption

60 VA

Environmental resistance

Ambient temperature

+5 to +40 °C41 to 104 °F

相对湿度

35 to 80 % RH (No condensation)

Weight

Approx. 20 kg