
Spectral-Interference Wafer Thickness Meter
SI-F80R series
ControllerSI-F1001
Specifications
Model |
SI-F1001*1 |
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Type |
Main Controller Separate type*2 |
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No. of connectable spectrum units |
2 |
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Display |
Minimum display unit |
0.001 µm |
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Display range |
±999.999 µm to ±9999.99 mm (7 settings selectable) |
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Display cycle |
10 times/sec. |
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Terminal block |
Laser remote interlock input |
Non-voltage input*3 |
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TIMING1 input |
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RESET1 input |
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Auto-zero1 input |
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Laser control input |
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Analog voltage output |
±10 V x 2 outputs, Output impedance: 100 Ω*3 |
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Analog current output |
4 to 20 mA x 2 outputs, Maximum load resistance: 350 Ω*3 |
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Alarm output |
NPN open-collector output (N.C.)*3 |
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General comparator output |
NPN open-collector output*3 |
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Expansion connector |
TIMING2 input |
Non-voltage input*3 |
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RESET input |
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Auto-zero input |
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Program switch input |
Non-voltage input x 3 inputs*3 |
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Alarm output |
NPN open-collector output (N.C.)*3 |
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Comparator/ binary output |
Binary output |
Measured value data output (21 bits) OUT selectable NPN open-collector output*3 |
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Strobe output |
NPN open-collector output*3 |
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Binary selection output |
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Binary selection input |
Non-voltage input*3 |
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RS-232C interface |
Measured data output and control input/output (Baud rate selectable to 115,200 bps max.) |
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USB interface |
USB 2.0 high speed compliant (USB 1.1 Full-SPEED compatible) |
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Ethernet interface |
100Base-TX/10Base-T |
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Major functions |
12 Out simultaneous measurement |
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Rating |
Power voltage |
24 VDC ±10 %, Ripple (P-P) 10 % or less |
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Current consumption |
One head connected: 0.6 A or less. Six heads connected: 1.5 A or less. |
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Environmental resistance |
Ambient temperature |
0 to +50 °C32 to 122 °F*4 |
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相对湿度 |
35 to 85 % RH (No condensation) |
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Vibration resistance |
10 to 55 Hz, Double amplitude 0.5 mm0.02", 2 hours in each of the X, Y, and Z directions |
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Weight |
Approx. 600 g |
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*1The SI-F1003 can be used independently, The measured value display and setting change can be done with the display panel(SI-FD500) and setup support software(SI-H3). |
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