Confocal Displacement Sensor

CL-3000 series

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光学单元(30 mm・Focused spot type・Export Control Products)CL-P030G

Specifications

Model

CL-P030G*1

Type

光学单元

Head

CL-P030*1

Reference distance

30 mm1.18 "

Reference measurement range

Measurement range

±3.7 mm±0.15 "

Linearity

±0.81 µm±0.000032 "*2

High precision measurement range

Measurement range

±1.0 mm±0.04 "

Linearity

±0.59 µm±0.000023 "*2

Resolution

0.015 µm*3

Spot diameter

ø 38 µmø 0.0015 "

Laser class

光学单元

Class 1

Sampling cycle

100/200/500/1000 µs (Adjustable 4-stage)

Environmental resistance

Enclosure rating

Head

IP67 (IEC60529)

Ambient light

Target surface illuminance 30,000 lux (Incandescent lamp)

Ambient temperature

0 to 50 °C32 to 122 °F

相对湿度

20 % RH to 85 % RH (no condensation)

Vibration resistance

Head

10 to 57 Hz, double amplitude 1.5 mm0.06 "; 2 hours each for X, Y, and Z axes

光学单元

10 to 57 Hz, double amplitude 0.3 mm0.01 "; 2 hours each for X, Y, and Z axes

Shock resistance

15 G 6 ms

Temperature characteristic

Head

0.005 % of F.S./°C

光学单元

0.015 % of F.S./°C

Material

Head

Front: SUS Rear: Aluminum

光学单元

Polycarbonate

Weight

Head

Approx. 200 g

光学单元

Approx. 1,600 g

*1Sensor head and optical unit are a matched pair. Not cross compatible.
*2Value measured in displacement mode with KEYENCE reference workpiece (mirrored surface) .
*3Value measured using 16,384 average cycles with KEYENCE reference workpiece (mirrored surface) . (Value measured with 4,096 average cycles on CL-PT010 only.)

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