Finding The Right Solution for Height/Step Measurement
When looking for the best way to measure height or step height, there are a number of important factors to consider, including the shape of the target, the type of measurement system, and the installation environment. Selecting equipment that doesn't adequately meet your needs can lead to insufficient precision and increased man-hours during production, so choosing the right equipment is important. This site is designed to help you discover the best way to perform this measurement with confidence.
如果光轴不垂直于目标,则为高度值以高度值引起的测量误差,如图1所示。 如果θ大于0.8°,则测量误差约为0.01%,因此,如果您担心其效果,请提前更正倾斜度。 You can easily correct the tilt by preparing one master workpiece and using the scaling settings.
[Figure 1]A: Optical-axis tilt θ
Transparent objects and objects with mirror finished surfaces
Also, if the target is a transparent object, a key point for stable measurement is to have the transparent object be at least as thick as a certain value. If the object is thin, the value measured for the front surface height may be lower than it should be due to the effect of the light reflected from the back surface of the transparent object. The minimum thickness limits that ensure stable measurement vary depending on the sensor head type, the transparency of the target and the reflectivity of the back surface.
[图2]答:α/2
Precautions during Step Measurement
The Effect of the tilt of the sensor head
如果2D激光位移传感器的光轴不垂直于目标,则如图3所示,由角度θ引起的测量误差发生在阶跃值中。 The larger the distance (X) between the two points being measured for the step, the greater the measurement error. For example, even if the tilt θ is only 0.1°, the measurement error becomes approximately 50 μm if X = 30 mm. Therefore, the tilt correction function is generally used when performing step measurements.
[图3]A: Optical-axis tilt θB: True stepC:测量值D: Distance between two points (X)
Transparent objects and objects with mirror finished surfaces
此外,如果目标是一个透明的对象,则必须至少与一定值一样厚,以便准确测量表面高度。 If the object is thin, the value measured for the front surface height may be lower than it should be due to the effect of the light reflected from the back surface of the transparent object. The minimum thickness limits that ensure stable measurement vary depending on the sensor head type, the transparency of the target and the reflectivity of the back surface.
When the probe comes into contact with a soft target, the target can be compressed, which leads to a corresponding measurement error. 通过非接触测量,可以测量变形的靶标,例如软靶和液体表面。
非接触式激光位移sensor, the measurement spot (which ranges from a few micrometers to hundreds of micrometers in size) is generally smaller than the probes used in contact measurement. This makes it possible to accurately measure the base height of more narrow indentations with the non-contact method.